Short-wave infrared cameras in semiconductor inspection applications

Short-wave infrared cameras in semiconductor inspection applications

Authors

Raf Vandersmissen

 

Abstract

In this article, we discuss several applications of SWIR (short-wave infrared) cameras in semiconductor inspection applications. Most of these applications rely on the capability of SWIR cameras to see through semiconductor materials such as silicon.

 

 

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World's first InGaAs camera photon emission microscope

Xenics enabled Semicaps to realize the world's first InGaAs camera photon emission microscope in 2004. Since then Xenics and sInfraRed have supported us in our endeavors for better sensitivity and resolution in photon and thermal emission microscopy.

Chua Choon Meng, CEO Semicaps