Short-wave infrared cameras in semiconductor inspection applications

Short-wave infrared cameras in semiconductor inspection applications

Authors

Raf Vandersmissen

 

Abstract

In this article, we discuss several applications of SWIR (short-wave infrared) cameras in semiconductor inspection applications. Most of these applications rely on the capability of SWIR cameras to see through semiconductor materials such as silicon.

 

 

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Extreme compact size and low weight

Given the extremely compact size and low weight of the Xenics XS-1.7-320 SWIR camera it was extremely easy to integrate it into our existing optical setup.

University of Strathclyde